한국전기화학회

Vol.6, No.4, November 2003

[ LiCoO2 ] Thin Film Deposited by Bias Sputtering Method I. Electrochemical Characteristics바이어스 스퍼터링 법으로 제조된 LiCoO2박막 I. 전기화학적 특성: JKES Vol.6, No.4, pp.261~265, November 2003; DOI : 10.5229/JKES.2003.6.4.261

Y. J. LEE, H. Y. Park, W. I. Cho, B. W. Cho, and K. B. Kim

Dept. of Material Science & Engineering, Yonsei Univ., Seoul 120-749, Korea Eco-Nano Research Center, KIST, Seoul 136-791, Korea Dept. of Material Science & Engineering, Korea Univ., Seoul 136-701, Korea

The heat treatment process of thin film microbatteries manufacturing processes has several problems. This study, without heat treatment, considered the characteristics of LiCoO2 thin films deposited by bais sputtering method inducing the structural change

Keyword : LiCoO2, Thin film, Substrate bias, Sputtering, Microbatteries.

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JKES

Vol.6, No.4, November 2003