한국전기화학회

Vol.9, No.4, November 2006

Study of Stress Changes in Nanocrystalline CoW Thin/Thick Film Alloys Eletrodeposited from Citrate BathsCitrate Baths로부터 전기도금된 나노결정립 CoW 합금 박막/후막의 응력변화에 대한 연구: JKES Vol.9, No.4, pp.141~150, November 2006; DOI : 10.5229/JKES.2006.9.4.141

Ik-Jong Cho, Deok-Yong Park, Hyun-Man Ihn조익종, 박덕용, 인현만

Department of Applied Materials Engineering, Hanbat National University, Daejeon, 305-719, Republic of Korea한밭대학교응용소재공학과

Nanocrystalline CoW thin/thick film alloys were electodeposited from citrate baths to investigate the influences of metal ion concentration, current density and solution pH on chemical composition, current efficiency, residual stress, surface morphology,

Keyword : Residual stress, CoW thin films, Electrodeposition, Nanocrystalline

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JKES

Vol.9, No.4, November 2006