Deok-Yong Park박덕용
Department of Applied Materials Engineering, Division of Advanced Materials Engineering, Hanbat National
University, Daejeon 305-719, Republic of Korea한밭대학교 신소재공학부 응용소재공학전공
Nanocrystalline Ni thin films were electodeposited from chloride baths to investigate
the influences of additive concentration, current density and solution pH on residual (or internal)
stress, surface morphology, and microstructure of the films. It was o
Keyword : Residual stress, Ni thin films, Electrodeposition, Nanocrystalline, MEMS/NEMS.