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Vol.14, No.3, August 2011

Study of Stress Changes in Nanocrystalline Ni Thin Films Eletrodeposited from Chloride BathsChloride Bath로부터 전기도금된 나노결정립 니켈 박막의 잔류응력 변화에 대한 연구
JKES Vol.14, No.3, pp.163~170, August 2011
DOI : 10.5229/JKES.2011.14.3.163
Deok-Yong Park박덕용
Department of Applied Materials Engineering, Division of Advanced Materials Engineering, Hanbat National University, Daejeon 305-719, Republic of Korea한밭대학교 신소재공학부 응용소재공학전공
Nanocrystalline Ni thin films were electodeposited from chloride baths to investigate the influences of additive concentration, current density and solution pH on residual (or internal) stress, surface morphology, and microstructure of the films. It was o
Keyword : Residual stress, Ni thin films, Electrodeposition, Nanocrystalline, MEMS/NEMS.

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