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Vol.16, No.1, February 2013
- Silicon Nanostructures Fabricated by Metal-AssistedMAC Etch를 이용한 Si 나노 구조 제조
- JKES Vol.16, No.1, pp.1-8, February 2013
- DOI : 10.5229/JKES.2013.16.1.1
Department of Applied Chemistry, Kumoh National Institute of Technology, Gumi 730-701 Korea금오공과대학교 응용화학과
Keyword : Metal-assisted chemical etching, MAC etch, Si nanowire
