한국전기화학회

Vol.4, No.4, November 2001

The Electrochemical Characteristics of Mercapto Compounds on the Copper Electroplating전기구리도금에 미치는 Mercapto화합물의 전기화학적 특성: JKES Vol.4, No.4, pp.160~165, November 2001; DOI : 10.5229/JKES.2001.4.4.160

Sang Ki Son, Yoo Yong Lee, Byung Won Cho, Jae Bong Lee, Tae Hee Lee손상기, 이유용, 조병원, 이재봉, 이태희

Department of Chemical Engineering, Yonsei University, Seoul 120-749, Korea Department of Metallurgy & Materials Engineering, Kookmin University, Seoul 136-702, Korea Nano Eco Research Center, KIST, P.O.Box 131, Sungbuk, Seoul, 136-650, Korea연세대학교 화학공학과, 국민대학교 금속공학과, 한국과학기술연구원 나노환경연구센터

The eletrochemical charateristics of mercapto compound additives on the copper electroplating for semi conductor metalization were investigated. Mercapto compounds including sulfur atom is known that they activate deposition rate in eletroplating. Four di

Keyword : EQCM, Additive, Electroplating, Cathodic polarization

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JKES

Vol.4, No.4, November 2001